Ellipsometry
Operator can choose different approach to know physical
parameters of the sample.
ML-SAVER
Operator can choose different approach to know physical parameters of the sample.
Transmissive analysis: Retardation R0,Rth and optical axis direction.
Reflective analysis: layer thickness, refractive indices.
Feature
- Dual measurement mechanism by Multi-head system.
- Combaining both Polarimeter and Ellipsometer.
- On-board CCD for monitoring the reflected light.
- Measure the thickness and refractive indies of a thin film as Ellipsometer.
Spot size
3mm
Outer size
W1100mm × D720mm × H1460mm
Sample maximum size
W50mm × D100mm × H2mm
ARASA
Feature
ARASA can measure surface roughness. ARASA works well with simulator for getting higher efficiency of PV cell.