Ellipsometry

Ellipsometry

Operator can choose different approach to know physical
parameters of the sample.

Ellipso-3

Operator can choose different approach to know physical parameters of the sample.

Transmissive analysis: Retardation R0,Rth and optical axis direction.

Reflective analysis: layer thickness, refractive indices.

Feature

  • Dual measurement mechanism by Multi-head system.
  • Combaining both Polarimeter and Ellipsometer.
  • On-board CCD for monitoring the reflected light.
  • Measure the thickness and refractive indies of a thin film as Ellipsometer.

Spot size

3mm

Outer size

W1100mm × D720mm × H1460mm

Sample maximum size

W50mm × D100mm × H2mm